Real Time In-Situ Data Acquisition Using Autonomous On-Wafer Sensor Arrays
نویسندگان
چکیده
This paper explores the feasibility of integrating in-situ sensors onto the surface of a silicon wafer, with the objective of placing this wafer into a processing tool to obtain real time measurements. This technique has numerous benefits: increased measurement speed, reduced sensor introduction cost, and increased spatial and temporal information. Various sensors and sensor wafers have been developed and tested in a variety of processing tools. Repeatable, real time measurements in harsh environments such as high temperature and plasma have been obtained. Index Terms – Sensor wafer, autonomous operation, in-situ data acquitsition, wireless communication
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